THE STRUCTURAL PROPERTIES OF Ta DOPED DLC COATINGS FOR THE DENTAL APPLICATIONS USING HiPIMS

Abstract

Diamond-like Carbon (DLC) coatings are considered to be one of the most valuable engineering materials for various industrial applications, such as biomaterials and tools. Metallic and non-metallic elements and/or compound are added to the DLC coatings to develop the structures and properties (mechanical, tribological, etc.). In this study, Ta doped DLC was grown on Ti6Al4V alloys using High Power Impulse Magnetron Sputtering (HİPIMS)-Closed Field Unbalanced Magnetron Sputtering (CFUBMS) system. In the process, only the Ta target current was changed as 3A, 4A and 5A. XPS was used to determine the bond structure and percentage of the elements of Ta-DLC coatings. The microstructure and thickness of Ta-DLC coatings were examined by SEM. The structure of a-C with amorphous structure in Ta-DLC coatings was characterized by Raman. The internal stress in Ta-DLC coatings was analyzed using FTIR. The results showed that the microstructure of Ta-DLC was very dense and low internal stress.