Physical Properties of Different Thicknesses ZnO Thin Films Prepared via Sol-gel Spin Coating Technique

  • Rohanieza Abdul Rahman Integrated Sensors Research Group, Faculty of Electrical Engineering, Universiti Teknologi MARA (UiTM), 40450 Shah Alam, Selangor, Malaysia
  • Muhammad AlHadi Zulkefle Integrated Sensors Research Group, Faculty of Electrical Engineering, Universiti Teknologi MARA (UiTM), 40450 Shah Alam, Selangor, Malaysia
  • Sukreen Hana Herman Integrated Sensors Research Group, Faculty of Electrical Engineering, Universiti Teknologi MARA (UiTM), 40450 Shah Alam, Selangor, Malaysia
  • Rosalena Irma Alip Integrated Sensors Research Group, Faculty of Electrical Engineering, Universiti Teknologi MARA (UiTM), 40450 Shah Alam, Selangor, Malaysia

Abstract

This paper presents the investigation on the thickness of the ZnO thin films by varying the number of deposition layers during the spin coating deposition process. ZnO thin films were deposited with a different number of layers (ranging from 1, 3, and 5) and the main purpose of this study is to explore the effect of the thickness on the properties of ZnO thin films. The deposited thin films were characterized using field emission scanning electron microscope, surface profilometer, and x-ray diffraction. From the characterization results, the morphology of the ZnO thin films changed significantly with the number of layers along with their thickness value. As expected, the thickness increased as the number of layers increased. The crystalline quality of the deposited film improved as the thickness increased. A change in crystallographic orientation was also observed in which, the thicker, thin films showed crystal growth in (102) direction whereas the thinner one was in (101) direction. A small increase in crystallite size for dominant orientation also was observed with the increase of film thickness.

Published
2021-08-27
How to Cite
ABDUL RAHMAN, Rohanieza et al. Physical Properties of Different Thicknesses ZnO Thin Films Prepared via Sol-gel Spin Coating Technique. Scientific Research Journal, [S.l.], v. 18, n. 2, p. 147-160, aug. 2021. ISSN 2289-649X. Available at: <https://myjms.mohe.gov.my/index.php/SRJ/article/view/13035>. Date accessed: 21 may 2022. doi: https://doi.org/10.24191/srj.v18i2.13035.